(19)

(11)

EP 2 097 790 A2

(12)

(88) Date of publication A3: 04.12.2008 (43) Date of publication: 09.09.2009 Bulletin 2009/37 (21) Application number: 07869445.2 (22) Date of filing: 18.12.2007

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) G01N 21/95(2006.01) F16C 39/06(2006.01) H01L 21/68(2006.01) (86) International application number: PCT/US2007/087953 (87) International publication number: WO 2008/077048 (26.06.2008 Gazette 2008/26)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR (30) Priority: 18.12.2006 US 870528 P 02.02.2007 US 670896 09.07.2007 US 948667 P (71) Applicant: KLA-Tencor Corporation Milpitas, CA 95035 (US)	(72) Inventors: ZYWNO, Marek San Jose, California 95120 (US) BAREKET, Noah Saratoga, California 95070 (US) (74) Representative: Lukaszyk, Szymon  Kancelaria Patentowa Lukaszyk ul. Glowackiego 8/6 40-062 Katowice 40-062 Katowice (PL)