(19)
(11) EP 2 097 924 A2

(12)

(88) Date of publication A3:
21.08.2008

(43) Date of publication:
09.09.2009 Bulletin 2009/37

(21) Application number: 07870039.0

(22) Date of filing: 28.12.2007
(51) International Patent Classification (IPC): 
H01L 21/4763(2006.01)
H01L 21/768(2006.01)
(86) International application number:
PCT/US2007/089061
(87) International publication number:
WO 2008/083284 (10.07.2008 Gazette 2008/28)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

(30) Priority: 29.12.2006 US 882671 P

(71) Applicant: Cufer Asset Ltd. L.L.C.
Wilmington, DE 19801 (US)

(72) Inventor:
  • TREZZA, John
    Nashua, New Hampshire 03063 (US)

(74) Representative: Bruce, Alexander Richard Henry et al
Venner Shipley LLP 20 Little Britain
London EC1A 7DH
London EC1A 7DH (GB)

   


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