(19)
(11)
EP 2 097 924 A2
(12)
(88)
Date of publication A3:
21.08.2008
(43)
Date of publication:
09.09.2009
Bulletin 2009/37
(21)
Application number:
07870039.0
(22)
Date of filing:
28.12.2007
(51)
International Patent Classification (IPC):
H01L
21/4763
(2006.01)
H01L
21/768
(2006.01)
(86)
International application number:
PCT/US2007/089061
(87)
International publication number:
WO 2008/083284
(
10.07.2008
Gazette 2008/28)
(84)
Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
(30)
Priority:
29.12.2006
US 882671 P
(71)
Applicant:
Cufer Asset Ltd. L.L.C.
Wilmington, DE 19801 (US)
(72)
Inventor:
TREZZA, John
Nashua, New Hampshire 03063 (US)
(74)
Representative:
Bruce, Alexander Richard Henry et al
Venner Shipley LLP 20 Little Britain
London EC1A 7DH
London EC1A 7DH (GB)
(54)
FRONT-END PROCESSED WAFER HAVING THROUGH-CHIP CONNECTIONS