(19)

(11)

EP 2 102 898 A2

(12)

(88) Date of publication A3: 16.10.2008 (43) Date of publication: 23.09.2009 Bulletin 2009/39 (21) Application number: 07872342.6 (22) Date of filing: 12.11.2007

(51) International Patent Classification (IPC):  H01L 21/00(2006.01) (86) International application number: PCT/US2007/084432 (87) International publication number: WO 2008/085604 (17.07.2008 Gazette 2008/29)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR (30) Priority: 10.11.2006 US 865385 P (71) Applicant: SoloPower, Inc. Milpitas CA 95035 (US)	(72) Inventor: BASOL, Bulent, M. Manhattan Beach, CA 90266 (US) (74) Representative: Freeman, Avi  Beck Greener Fulwood House 12 Fulwood Place London WC1V 6HR London WC1V 6HR (GB)