Improved adhesion to copper and copper electromigration resistance

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EP 2 105 960 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	11.10.2017 Bulletin 2017/41

(45)	Mention of the grant of the patent:
	02.08.2017 Bulletin 2017/31

(21)	Application number: 09155899.9

(22)	Date of filing: 23.03.2009

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International Patent Classification (IPC):

H01L 21/768^(2006.01)
C23C 16/02^(2006.01)
C23C 16/56^(2006.01)

H01L 21/285^(2006.01)
C23C 16/18^(2006.01)

(54)	Improved adhesion to copper and copper electromigration resistance Verbesserte Haftung an Kupfer für verbesserten Kupfer-Elektromigrationswiderstand Adhésion améliorée au cuivre pour améliorer la résistance à l'électromigration du cuivre

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

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Priority:

24.03.2008 US 38874 P
23.06.2008 US 74843 P
18.03.2009 US 406467

(43)	Date of publication of application:
	30.09.2009 Bulletin 2009/40

(73)	Proprietor: Versum Materials US, LLC
	Tempe, AZ 85284 (US)

(72)	Inventors:
	Vrtis, Raymond Nicholas Orefield,, PA 18069 (US) Matz, Laura M. Allentown,, PA 18104 (US) O'Neill, Mark Leonard Allentown,, PA 18104 (US)

(74)	Representative: Beck Greener
	Fulwood House 12 Fulwood Place London WC1V 6HR London WC1V 6HR (GB)

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References cited: :

EP-A2- 1 073 106
WO-A2-2007/060640
US-B1- 6 518 167

WO-A2-01/99173
JP-A- 2004 146 516
US-B1- 7 013 916

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).