(19)
(11) EP 2 113 085 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
24.07.2019 Bulletin 2019/30

(45) Mention of the grant of the patent:
12.06.2019 Bulletin 2019/24

(21) Application number: 08729944.2

(22) Date of filing: 15.02.2008
(51) International Patent Classification (IPC): 
H05H 1/36(2006.01)
G05F 1/10(2006.01)
H05H 1/46(2006.01)
 H01H 9/50(2006.01)
H02M 7/00(2006.01)
H01J 37/32(2006.01)
(86) International application number:
PCT/US2008/054056
(87) International publication number:
WO 2008/103600 (28.08.2008 Gazette 2008/35)

(54)

ARC RECOVERY WITHOUT OVER-VOLTAGE PLASMA CHAMBER POWER SUPPLIES USING A SHUNT SWITCH

LICHTBOGENWIEDERHERSTELLUNG OHNE ÜBERSPANNUNGS-PLASMAKAMMER-STROMVERSORGUNG MITHILFE EINES SHUNT-SCHALTERS

RÉCUPÉRATION D'ARC SANS ALIMENTATION ÉLECTRIQUE DE CHAMBRE À PLASMA EN SURTENSION UTILISANT UN COMMUTATEUR DE DÉRIVATION

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

(30) Priority: 22.02.2007 US 677786

(43) Date of publication of application:
04.11.2009 Bulletin 2009/45

(73) Proprietor: AES Global Holdings, Pte. Ltd.
Singapore 068898.3 (SG)

(72) Inventors:
  • ILIC, Milan
    Fort Collins, CO 80528 (US)
  • SHILO, Vladislav, V.
    Fort Collins, CO 50524 (US)
  • HUFF, Robert
    Fort Collins, CO 80528 (US)

(74) Representative: Gill, David Alan 
WP Thompson 138 Fetter Lane
London EC4A 1BT
London EC4A 1BT (GB)


(56) References cited: : 
US-A- 5 303 139
US-A1- 2004 182 697
US-A1- 2006 049 831
US-B1- 6 943 317
 US-A1- 2003 205 460
US-A1- 2004 245 999
US-B1- 6 621 674
US-B2- 6 736 944
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).