(19)

(11)

EP 2 115 186 A1

(12)

(43) Date of publication: 11.11.2009 Bulletin 2009/46 (21) Application number: 07703474.2 (22) Date of filing: 26.02.2007

(51) International Patent Classification (IPC):  C23C 28/02(2006.01) C22C 19/05(2006.01) C23C 30/00(2006.01) (86) International application number: PCT/EP2007/001289 (87) International publication number: WO 2008/104188 (04.09.2008 Gazette 2008/36)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (71) Applicant: Siemens Aktiengesellschaft 80333 München (DE)	(72) Inventor: STAMM, Werner 45481 Mülheim (DE) (74) Representative: Wolff, Harry  Siemens Aktiengesellschaft Postfach 22 16 34 80506 München 80506 München (DE)