(19)

(11)

EP 2 115 788 A2

(12)

(88) Date of publication A3: 12.02.2009 (43) Date of publication: 11.11.2009 Bulletin 2009/46 (21) Application number: 08715844.0 (22) Date of filing: 18.02.2008

(51) International Patent Classification (IPC):  H01L 31/11(2006.01) H01L 51/44(2006.01) (86) International application number: PCT/EP2008/001248 (87) International publication number: WO 2008/098797 (21.08.2008 Gazette 2008/34)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR (30) Priority: 16.02.2007 US 901747 P (71) Applicant: ETeCH AG 8032 Zürich (CH)	(72) Inventors: GRAETZEL, Michael CH-1025 St-Sulpice (CH) SNAITH, Henry, James Oxon OX14 1JN (GB) (74) Representative: Liebetanz, Michael et al Isler & Pedrazzini AG Gotthardstrasse 53 Postfach 1772 8027 Zürich 8027 Zürich (CH)