| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL
PT RO SE SI SK TR |
|
Designated Extension States: |
|
AL BA MK RS |
| (30) |
Priority: |
20.03.2008 US 38263
|
| (43) |
Date of publication of application: |
|
25.11.2009 Bulletin 2009/48 |
| (60) |
Divisional application: |
|
10170734.7 / 2249372 |
| (73) |
Proprietors: |
|
- Ruhr-Universität Bochum
44801 Bochum (DE)
Designated Contracting States:
AT CH DE FR GB HU IT LI NL
- Heil, Brian George
65199 Wiesbaden (DE)
Designated Contracting States:
BE BG CY CZ DK EE ES FI GR HR IE IS LT LU LV MC MT NO PL PT RO SE SI SK TR
|
|
| (72) |
Inventors: |
|
- HEIL, Brian, George
65199 Wiesbaden (DE)
- CZARNETZKI, Uwe
44879 Bochum (DE)
- BRINKMANN, Ralf, Peter
40699 Erkrath (DE)
- MUSSENBROCK, Thomas
42283 Wuppertal (DE)
|
| (74) |
Representative: Richardt Patentanwälte |
|
Wilhelmstraße 7
65185 Wiesbaden
65185 Wiesbaden (DE) |
| (56) |
References cited: :
WO-A-99/14699
US-A1- 2004 000 875
US-A1- 2007 023 398
|
US-A1- 2003 164 142
US-A1- 2006 113 037
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| |
|
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- BOYLE P C ET AL: "Independent control of ion current and ion impact energy onto electrodes
in dual frequency plasma devices; Control of ion current and ion impact energy" JOURNAL
OF PHYSICS D. APPLIED PHYSICS, IOP PUBLISHING, BRISTOL, GB, vol. 37, no. 5, 7 March
2004 (2004-03-07), pages 697-701, XP020015888 ISSN: 0022-3727
- SCHULZE J ET AL: "Space and phase resolved plasma parameters in an industrial dual-frequency
capacitively coupled radio-frequency discharge; Space and phase resolved plasma parameters
in dual-frequency CCRF discharge" JOURNAL OF PHYSICS D. APPLIED PHYSICS, IOP PUBLISHING,
BRISTOL, GB, vol. 40, no. 22, 21 November 2007 (2007-11-21), pages 7008-7018, XP020126757
ISSN: 0022-3727
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