| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE
SI SK TR |
| (43) |
Date of publication of application: |
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02.12.2009 Bulletin 2009/49 |
| (73) |
Proprietor: Selex Electronic Systems S.p.A. |
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Roma (IT) |
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| (72) |
Inventors: |
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- BRUNETTI, Francesca
I-00044 Frascati (IT)
- DI CARLO, Aldo
I-00155 Roma (IT)
- LUCCI, Massimiliano
I-00155 Roma (IT)
- ORLANDUCCI, Silvia
I-00146 Roma (IT)
- RICCITELLI, Riccardo
I-00040 Lariano (IT)
- TERRANOVA, Maria Letizia
I-00157 Roma (IT)
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| (74) |
Representative: Bergadano, Mirko et al |
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Studio Torta S.p.A.
Via Viotti, 9 10121 Torino 10121 Torino (IT) |
| (56) |
References cited: :
WO-A-00/24027 JP-A- 2006 128 083 US-A1- 2004 169 458
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JP-A- 2006 024 516 JP-A- 2006 253 100
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- SPARKS D R ET AL: "Chip-Level Vacuum Packaging of Micromachines Using NanoGetters"
IEEE TRANSACTIONS ON ADVANCED PACKAGING, IEEE SERVICE CENTER, PISCATAWAY, NJ, US,
vol. 26, no. 3, 3 August 2003 (2003-08-03), pages 277-282, XP002330172 ISSN: 1521-3323
cited in the application
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