(19)
(11) EP 2 132 764 A2

(12)

(88) Date of publication A3:
29.01.2009

(43) Date of publication:
16.12.2009 Bulletin 2009/51

(21) Application number: 08730756.7

(22) Date of filing: 26.02.2008
(51) International Patent Classification (IPC): 
H01J 37/08(2006.01)
H01J 27/16(2006.01)
C23C 14/35(2006.01)
 H01J 27/18(2006.01)
H01J 37/32(2006.01)
(86) International application number:
PCT/US2008/055016
(87) International publication number:
WO 2008/106448 (04.09.2008 Gazette 2008/36)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

(30) Priority: 26.02.2007 US 678979
26.02.2007 US 891669 P

(71) Applicant: Veeco Instruments Inc.
Woodbury, NY 11797 (US)

(72) Inventors:
  • HAYES, Alan, V.
    Great Neck, NY 11021 (US)
  • YEVTUKHOV, Rustam
    Briarwood, NY 11435 (US)
  • KANAROV, Viktor
    Bellmore, NY 11710 (US)
  • DRUZ, Boris, L.
    Brooklyn, NY 11223 (US)

(74) Representative: Findlay, Alice Rosemary 
Reddie & Grose 16 Theobalds Road
London WC1X 8PL
London WC1X 8PL (GB)

   


(54) ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE