(19)
(11) EP 2 139 680 A2

(12)

(88) Date of publication A3:
26.02.2009

(43) Date of publication:
06.01.2010 Bulletin 2010/01

(21) Application number: 08826083.1

(22) Date of filing: 02.04.2008
(51) International Patent Classification (IPC): 
B32B 33/00(2006.01)
H01L 21/20(2006.01)
(86) International application number:
PCT/US2008/059095
(87) International publication number:
WO 2009/005862 (08.01.2009 Gazette 2009/02)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

(30) Priority: 02.04.2007 US 909505 P

(71) Applicant: Arizona Board of Regents, acting for and on behalf of Arizona State University
Scottsdale, AZ 85257-9908 (US)

(72) Inventors:
  • KOUVETAKIS, John
    Mesa, AZ 85207 (US)
  • TICE, Jesse
    Tempe, AZ 85283 (US)
  • FANG, Yan-yan
    Tempe, AZ 85281 (US)

(74) Representative: Zwicker, Jörk et al
Dr. Volker Vossius Patent- und Rechtsanwaltskanzlei Geibelstrasse 6
81679 München
81679 München (DE)

   


(54) NOVEL METHODS FOR MAKING AND USING HALOSILYLGERMANES