(19)

(11)

EP 2 140 488 A1

(12)

(43) Date of publication: 06.01.2010 Bulletin 2010/01 (21) Application number: 08737488.0 (22) Date of filing: 15.04.2008

(51) International Patent Classification (IPC):  H01L 21/762(2006.01) H01L 21/324(2006.01) H01L 21/20(2006.01) (86) International application number: PCT/IB2008/000967 (87) International publication number: WO 2008/132569 (06.11.2008 Gazette 2008/45)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR (30) Priority: 27.04.2007 FR 0754777 (71) Applicant: S.O.I. TEC Silicon on Insulator Technologies 38190 Bernin (FR)	(72) Inventor: LE VAILLANT, Yves-Matthieu 38920 Crolles (FR) (74) Representative: Desormiere, Pierre-Louis et al Cabinet Beau de Loménie 158, rue de l'Université 75340 Paris Cedex 07 75340 Paris Cedex 07 (FR)