(19)

(11)

EP 2 145 348 A1

(12)

(43) Date of publication: 20.01.2010 Bulletin 2010/03 (21) Application number: 08747119.9 (22) Date of filing: 29.04.2008

(51) International Patent Classification (IPC):  H01L 21/00(2006.01) (86) International application number: PCT/US2008/061912 (87) International publication number: WO 2008/137429 (13.11.2008 Gazette 2008/46)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (30) Priority: 01.05.2007 US 915211 P (71) Applicant: Romny Scientific, Inc. Richmond, CA 94804 (US)	(72) Inventor: MINER, Andrew C. San Francisco, California 94121 (US) (74) Representative: Boyce, Conor et al FRKelly 27 Clyde Road Ballsbridge Dublin 4 Dublin 4 (IE)