(19)

(11)

EP 2 147 129 A1

(12)

(43) Date of publication: 27.01.2010 Bulletin 2010/04 (21) Application number: 08755637.9 (22) Date of filing: 16.05.2008

(51) International Patent Classification (IPC):  C23C 14/04(2006.01) H01L 51/50(2006.01) C23C 14/12(2006.01) H01L 51/00(2006.01) (86) International application number: PCT/US2008/063825 (87) International publication number: WO 2008/144467 (27.11.2008 Gazette 2008/48)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (30) Priority: 18.05.2007 US 938794 P (71) Applicant: E. I. Du Pont de Nemours and Company Wilmington, DE 19898 (US)	(72) Inventors: LANG, Charles, D. Goleta, California 93117 (US) GOENAGA, Alberto Simi Valley, California 93065 (US) SANT, Paul, Anthony Santa Barbara, California 93103 (US) (74) Representative: Matthews, Derek Peter  Frank B. Dehn & Co. St Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)