| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL
PT RO SE SI SK TR |
| (30) |
Priority: |
25.05.2007 GB 0710078
|
| (43) |
Date of publication of application: |
|
10.02.2010 Bulletin 2010/06 |
| (73) |
Proprietor: The Science and Technology Facilities Council |
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Swindon
Wiltshire SN2 1SZ (GB) |
|
| (72) |
Inventors: |
|
- STRACHAN, Mel
Edinburgh EH10 5PG (GB)
- KIRK, Katherine, Joanne
Paisley PA1 2BE (GB)
- COCHRAN, Alexander
Dundee DD2 1FD (GB)
|
| (74) |
Representative: Kinsler, Maureen Catherine |
|
Marks & Clerk LLP
Aurora
120 Bothwell Street Glasgow
G2 7JS Glasgow
G2 7JS (GB) |
| (56) |
References cited: :
WO-A-2006/091665
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JP-A- 2007 259 670
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| |
|
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- MOON ET AL: "A new fast inchworm type actuator with the robust I/Q heterodyne interferometer
feedback" MECHATRONICS, PERGAMON PRESS, OXFORD, GB, vol. 16, no. 2, 1 March 2006 (2006-03-01),
pages 105-110, XP005277389 ISSN: 0957-4158
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