ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIRO..CY..TRBGCZEEHUPLSK..HRIS..MTNO........................*JDIM360 Ver 2.15 (14 Jul 2008) - 2999001/02150773CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120120208W173deBibliographieenBibliographyfrBibliographieEP08775745.6200805272009112620100413enenen071007820070525GB2012020820120620100210201006201109072011362011032520120208201206G01B 17/00 20060101AFI20081217BHEP deAUSDEHNUNGSERFASSENDER AKTUATORenEXTENSION SENSING ACTUATORfrACTIONNEUR DE DÉTECTION D'EXTENSIONWO-A-2006/091665JP-A- 2007 259 670MOON ET AL: "A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback" MECHATRONICS, PERGAMON PRESS, OXFORD, GB, vol. 16, no. 2, 1 March 2006 (2006-03-01), pages 105-110, XP005277389 ISSN: 0957-4158STRACHAN, Mel19 St Ronan's TerraceEdinburgh EH10 5PGGBKIRK, Katherine, JoanneMicroscale Sensors School of engineering and Science University of the west of ScotlandPaisley PA1 2BEGBCOCHRAN, AlexanderInstitute for Medical Science and Technology University of Dundee Wilson House 1 Wurzburg LoanDundee DD2 1FDGBThe Science and Technology Facilities Council101262669MK/PE952142EPPolaris House North Star AvenueSwindon Wiltshire SN2 1SZGBKinsler, Maureen Catherine100042840Marks & Clerk LLP Aurora 120 Bothwell StreetGlasgow G2 7JSGBATBEBGCHCYCZDEDKEEESFIFRGBGRHRHUIEISITLILTLULVMCMTNLNOPLPTROSESISKTRGB200800179420080527enWO200814598320081204200849