(19)
(11) EP 2 161 619 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
17.07.2013 Bulletin 2013/29

(45) Mention of the grant of the patent:
22.05.2013 Bulletin 2013/21

(21) Application number: 09176909.1

(22) Date of filing: 02.04.2004
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)

(54)

Cleanup method and immersion lithography apparatus

Reinigungsverfahren und Immersionslithographiegerät

Méthode de nettoyage et appareil de lithographie par immersion

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 11.04.2003 US 462556
27.06.2003 US 482913

(43) Date of publication of application:
10.03.2010 Bulletin 2010/10

(62) Application number of the earlier application in accordance with Art. 76 EPC:
04759103.7 / 1614001

(73) Proprietor: Nikon Corporation
Tokyo 100-8331 (JP)

(72) Inventors:
  • Kawai, Hidemi
    Chiyoda-ku, Tokyo 100-8331 (JP)
  • Novak, W., Thomas
    Hillsborough, 94010 (US)
  • Watson, Douglas, C.
    Campbell, CA 95008 (US)
  • Hazelton, Andrew, J.
    Chiyoda-ku, Tokyo 100-8331 (JP)

(74) Representative: HOFFMANN EITLE 
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München
81925 München (DE)


(56) References cited: : 
EP-A1- 1 524 558
EP-A1- 1 632 991
JP-A- 10 255 319
US-B1- 6 496 257
 EP-A1- 1 628 329
WO-A1-99/49504
JP-A- 10 340 846
   
  • 'drawing sheets of application PCT/US04/10309 as filed', 28 October 2004, USPTO deel 'drawing sheets of application PCT/US04/10309 as filed', pages 1/6 - 6/6, XP055037737
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).