(84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL
PT RO SE SI SK TR |
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Designated Extension States: |
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AL BA MK RS |
(30) |
Priority: |
20.06.2007 US 936257 P
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(71) |
Applicant: Varian, Inc. |
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Palo Alto, CA 94304 (US) |
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(72) |
Inventors: |
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- CHIN, Laurence, Dwayne
Needham, MA 02492 (US)
- WILLIAMS, Archibald
Wareham, MA 02571 (US)
- SCHWALM, Martin
Lakeville, MA 02374 (US)
- FEENEY, Brett, Andrew
Fairfax, VA 22030 (US)
|
(74) |
Representative: Mollekopf, Gerd Willi |
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Kahler Käck Mollekopf,
Vorderer Anger 239 86899 Landsberg a. Lech 86899 Landsberg a. Lech (DE) |
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