(19)
(11) EP 2 164 648 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
09.11.2016 Bulletin 2016/45

(45) Mention of the grant of the patent:
21.09.2016 Bulletin 2016/38

(21) Application number: 08768449.4

(22) Date of filing: 13.06.2008
(51) International Patent Classification (IPC): 
B05D 5/12(2006.01)
H01L 21/02(2006.01)
 H01L 21/312(2006.01)
(86) International application number:
PCT/US2008/007415
(87) International publication number:
WO 2008/156680 (24.12.2008 Gazette 2008/52)

(54)

LOW K DIELECTRIC

DIELEKTRIKUM MIT NIEDRIGEM K-WERT

DIÉLECTRIQUE À CONSTANTE K FAIBLE

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

(30) Priority: 15.06.2007 US 934725 P

(43) Date of publication of application:
24.03.2010 Bulletin 2010/12

(73) Proprietor: SBA Materials, Inc.
San Jose, CA 95131 (US)

(72) Inventors:
  • PHILLIPS, Mark, L.F.
    Albuquerque, NM (US)
  • THOMS, Travis, P.S.
    Bosque Farms, NM (US)

(74) Representative: Ward, David Ian 
Marks & Clerk LLP Alpha Tower Suffolk Street Queensway
Birmingham B1 1TT
Birmingham B1 1TT (GB)


(56) References cited: : 
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US-A1- 2005 089 642
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US-A1- 2006 216 952
US-A1- 2006 276 041
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US-A1- 2005 196 974
US-A1- 2006 078 676
US-A1- 2006 249 818
US-A1- 2007 099 005
   
  • SHU YANG ET AL: "Molecular templating of nanoporous ultralow dielectric constant ( approximately=1.5) organosilicates by tailoring the microphase separation of triblock copolymers", CHEMISTRY OF MATERIALS, AMERICAN CHEMICAL SOCIETY, WASHINGTON, US, vol. 13, no. 9, 1 September 2001 (2001-09-01), pages 2762-2764, XP002252303, ISSN: 0897-4756, DOI: 10.1021/CM0102786
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).