(19)
(11) EP 2 165 312 A1

(12)

(43) Date of publication:
24.03.2010 Bulletin 2010/12

(21) Application number: 08760733.9

(22) Date of filing: 09.06.2008
(51) International Patent Classification (IPC): 
G06T 7/00(2006.01)
G01N 21/95(2006.01)
(86) International application number:
PCT/EP2008/057169
(87) International publication number:
WO 2008/152020 (18.12.2008 Gazette 2008/51)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated Extension States:
AL BA MK RS

(30) Priority: 12.06.2007 EP 07011460

(71) Applicant: ICOS VISION SYSTEMS N.V.
3001 Heverlee (BE)

(72) Inventor:
  • The designation of the inventor has not yet been filed
     ()

(74) Representative: Lukaszyk, Szymon 
Kancelaria Patentowa Lukaszyk ul. Glowackiego 8/6
40-062 Katowice
40-062 Katowice (PL)

   


(54) METHOD FOR SEMICONDUCTOR SUBSTRATE INSPECTION