(19)

(11)

EP 2 170 764 A2

(12)

(88) Date of publication A3: 19.02.2009 (43) Date of publication: 07.04.2010 Bulletin 2010/14 (21) Application number: 08769665.4 (22) Date of filing: 23.05.2008

(51) International Patent Classification (IPC):  B82B 3/00(2006.01) H01L 21/02(2006.01) G03F 7/26(2006.01) (86) International application number: PCT/US2008/064631 (87) International publication number: WO 2009/002644 (31.12.2008 Gazette 2009/01)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (30) Priority: 21.06.2007 US 999752 P 21.06.2007 US 999753 P (71) Applicant: 3M Innovative Properties Company Saint Paul, MN 55133-3427 (US)	(72) Inventors: ZHANG, Jun-Ying Saint Paul, Minnesota 55133-3427 (US) PORQUE, Jerome, C. Bridgewater, NJ 08807 (US) SAHLIN, Jennifer, J. Saint Paul, Minnesota 55133-3427 (US) SMITH, Terry, L. Saint Paul, Minnesota 55133-3427 (US) WANG, Ding Saint Paul, Minnesota 55133-3427 (US) (74) Representative: Voortmans, Gilbert J.L. et al 3M Europe S.A./N.V. OIPC Hermeslaan 7 1831 Diegem 1831 Diegem (BE)