(19)

(11)

EP 2 171 759 A1

(12)

(43) Date of publication: 07.04.2010 Bulletin 2010/14 (21) Application number: 08782269.8 (22) Date of filing: 23.07.2008

(51) International Patent Classification (IPC):  H01L 31/00(2006.01) (86) International application number: PCT/US2008/070900 (87) International publication number: WO 2009/015213 (29.01.2009 Gazette 2009/05)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (30) Priority: 24.07.2007 US 951608 P 24.10.2007 US 982400 P 25.04.2008 US 110120 (71) Applicant: Applied Materials, Inc. Santa Clara, CA 95054 (US)	(72) Inventors: SHENG, Shuran Santa Clara, California 95051 (US) CHAE, Yong Kee Pleasanton, California 94588 (US) CHOI, Soo Young Fremont, California 94539 (US) WON, Tae Kyung San Jose, California 95129 (US) LI, Liwei Sunnyvale, California 94086 (US) (74) Representative: Zimmermann & Partner  Isartorplatz 1 80331 München 80331 München (DE)