(19)
(11) EP 2 176 878 A1

(12)

(43) Date of publication:
21.04.2010 Bulletin 2010/16

(21) Application number: 08797523.1

(22) Date of filing: 08.08.2008
(51) International Patent Classification (IPC): 
H01L 21/20(2006.01)
(86) International application number:
PCT/US2008/072669
(87) International publication number:
WO 2009/021201 (12.02.2009 Gazette 2009/07)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated Extension States:
AL BA MK RS

(30) Priority: 08.08.2007 US 954744 P
08.08.2007 US 954767 P

(71) Applicant: The Regents of the University of California
Oakland, CA 94607 (US)

(72) Inventors:
  • ISO, Kenji
    Fujisawa Kanagawa 251-0056 (JP)
  • YAMADA, Hisashi
    Tsukuba Ibaraki 305-0817 (JP)
  • SAITO, Makoto
    Tsukuba, Ibaraki 305-0044 (JP)
  • HIRAI, Asako
    Santa Barbara, California 93103 (US)
  • DENBAARS, Steven, P.
    Goleta, California 93117 (US)
  • SPECK, James, S.
    Goleta, California 93117 (US)
  • NAKAMURA, Shuji
    Santa Barbara, California 93160 (US)

(74) Representative: Jackson, Martin Peter 
J.A. Kemp & Co. 14 South Square Gray's Inn
London WC1R 5JJ
London WC1R 5JJ (GB)

   


(54) PLANAR NONPOLAR M-PLANE GROUP III-NITRIDE FILMS GROWN ON MISCUT SUBSTRATES