(19)
(11) EP 2 183 769 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
23.08.2017 Bulletin 2017/34

(45) Mention of the grant of the patent:
19.07.2017 Bulletin 2017/29

(21) Application number: 08797141.2

(22) Date of filing: 04.08.2008
(51) International Patent Classification (IPC): 
C25D 5/02(2006.01)
 H01L 21/288(2006.01)
(86) International application number:
PCT/US2008/072136
(87) International publication number:
WO 2009/018581 (05.02.2009 Gazette 2009/06)

(54)

COPPER METALLIZATION OF THROUGH SILICON VIA

KUPFERMETALLISIERUNG EINER SI-DURCHKONTAKTIERUNG

MÉTALLISATION EN CUIVRE DE TROUS D'INTERCONNEXION DANS DU SILICIUM

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

(30) Priority: 02.08.2007 US 953602 P
05.06.2008 US 59039

(43) Date of publication of application:
12.05.2010 Bulletin 2010/19

(73) Proprietor: MacDermid Enthone Inc.
West Haven CT 06516 (US)

(72) Inventors:
  • RICHARDSON, Thomas, B.
    West Haven, CT 06515 (US)
  • ZHANG, Yun
    South Plainfield, New Jersey 07080 (US)
  • WANG, Chen
    Orange, Connecticut 06477 (US)
  • PANECCASIO, Vincent
    West Haven, CT 06516 (US)
  • WANG, Cai
    West Haven, Connecticut 06516 (US)
  • LIN, Xuan
    West Haven, CT 06516 (US)
  • HURTUBISE, Richard
    West Haven, CT 06516 (US)
  • ABYS, Joseph, A.
    New Haven, CT 06516 (US)

(74) Representative: Uexküll & Stolberg 
Partnerschaft von Patent- und Rechtsanwälten mbB Beselerstraße 4
22607 Hamburg
22607 Hamburg (DE)


(56) References cited: : 
WO-A1-2007/130710
US-A1- 2004 045 832
US-A1- 2005 045 488
US-A1- 2006 141 784
 WO-A2-2006/053242
US-A1- 2004 082 756
US-A1- 2006 141 784
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).