(19)
(11) EP 2 190 002 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
14.09.2016 Bulletin 2016/37

(45) Mention of the grant of the patent:
01.06.2016 Bulletin 2016/22

(21) Application number: 10001779.7

(22) Date of filing: 10.09.2002
(51) International Patent Classification (IPC): 
H01J 37/244(2006.01)
H01J 37/285(2006.01)
 H01J 37/28(2006.01)

(54)

Method for detecting a fine geometry

Verfahren zur Erfassung einer feinen Geometrie

Procédé de détection d'une géométrie fine

(84) Designated Contracting States:
DE FR GB NL

(30) Priority: 10.09.2001 JP 2001273432

(43) Date of publication of application:
26.05.2010 Bulletin 2010/21

(60) Divisional application:
16172147.7

(62) Application number of the earlier application in accordance with Art. 76 EPC:
02020243.8 / 1291900

(73) Proprietor: EBARA CORPORATION
Ohta-ku, Tokyo (JP)

(72) Inventors:
  • Hatakeyama, Masahiro
    Ohta-ku, Tokyo (JP)
  • Murakami, Takeshi
    Tokyo (JP)
  • Satake, Tohru
    Kanagawa-ken (JP)
  • Noji, Nobuharu
    Kanagawa-ken (JP)
  • Nagahama, Ichirota
    Ibaraki-ken (JP)
  • Yamazaki, Yuichiro
    Tokyo (JP)

(74) Representative: Carstens, Dirk Wilhelm 
Wagner & Geyer Gewürzmühlstraße 5
80538 München
80538 München (DE)


(56) References cited: : 
EP-A2- 0 590 308
US-A- 5 004 919
 JP-A- 2000 215 841
US-B1- 6 184 526
   
  • HORACEK MIROSLAV: "Detection of the angular distribution of the signal electrons in VLESEM" JOURNAL OF COMPUTER-ASSISTED MICROSCOPY, PLENUM PRESS, NEW YORK, NY, US, vol. 10, no. 1, 1 January 1999 (1999-01-01), pages 23-32, XP009098872 ISSN: 1040-7286
  • TAHER DAUD ET AL: "Charge -coupled-device response to electron beam energies of less than 1 keV up to 20 keV", OPTICAL ENGINEERING., vol. 26, no. 8, 1 August 1987 (1987-08-01) , pages 686-691, XP055166671, BELLINGHAM ISSN: 0091-3286
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).