......DE....FRGB........NL..........................................................................JJDIM360 Ver 1.28 (29 Oct 2014) - 2999001/02190002CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120160914W173deBibliographieenBibliographyfrBibliographieEP10001779.7200209102010022220110127enenen200127343220010910JP2016091420163720100526201021201606012016222015120720160914201637H01J 37/244 20060101AFI20100416BHEP H01J 37/28 20060101ALI20100416BHEP H01J 37/285 20060101ALI20100416BHEP deVerfahren zur Erfassung einer feinen GeometrieenMethod for detecting a fine geometryfrProcédé de détection d'une géométrie fineEP-A2- 0 590 308JP-A- 2000 215 841US-A- 5 004 919US-B1- 6 184 526HORACEK MIROSLAV: "Detection of the angular distribution of the signal electrons in VLESEM" JOURNAL OF COMPUTER-ASSISTED MICROSCOPY, PLENUM PRESS, NEW YORK, NY, US, vol. 10, no. 1, 1 January 1999 (1999-01-01), pages 23-32, XP009098872 ISSN: 1040-7286TAHER DAUD ET AL: "Charge -coupled-device response to electron beam energies of less than 1 keV up to 20 keV", OPTICAL ENGINEERING., vol. 26, no. 8, 1 August 1987 (1987-08-01) , pages 686-691, XP055166671, BELLINGHAM ISSN: 0091-328602020243.812919002002091016172147.720160531Hatakeyama, Masahiroc/o EBARA Corporation 11-1, Hameda Asahi-choOhta-ku, TokyoJPMurakami, Takeshi1-10-2-305, Higashinakanobu Shinagawa-kuTokyoJPSatake, Tohru14-47, Higashikaigankita 2-chome Chigasaki-shiKanagawa-kenJPNoji, Nobuharu8-2-7, Hisagi Zushi-shiKanagawa-kenJPNagahama, Ichirota1-3-19, Yokohama-cho Koga-shiIbaraki-kenJPYamazaki, Yuichiro6-28-20-907, Nishikasai Edogawa-kuTokyoJPEBARA CORPORATION100114279Y-E-27931 DIV11-1, Haneda Asahi-choOhta-ku, TokyoJPCarstens, Dirk Wilhelm100774030Wagner & Geyer Gewürzmühlstraße 580538 MünchenDEDEFRGBNL20100526201021