(19)
(11) EP 2 191 698 A2

(12)

(88) Date of publication A3:
16.04.2009

(43) Date of publication:
02.06.2010 Bulletin 2010/22

(21) Application number: 08806915.8

(22) Date of filing: 20.08.2008
(51) International Patent Classification (IPC): 
H05G 2/00(2006.01)
(86) International application number:
PCT/IB2008/002201
(87) International publication number:
WO 2009/024860 (26.02.2009 Gazette 2009/09)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated Extension States:
AL BA MK RS

(30) Priority: 23.08.2007 US 935643 P
02.04.2008 US 78663

(71) Applicant: ASML Netherlands B.V.
5504 DR Veldhoven (NL)

(72) Inventors:
  • BANINE, Vadim Yevgenyevich
    NL-5704 NK Helmond (NL)
  • IVANOV, Vladimir Vitalevich
    Moscow 119421 (RU)

(74) Representative: Slenders, Petrus J. W. 
ASML Netherlands B.V De Run 6501
NL-5504 DR Veldhoven
NL-5504 DR Veldhoven (NL)

   


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