(84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL
PT RO SE SI SK TR |
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Designated Extension States: |
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AL BA MK RS |
(30) |
Priority: |
23.08.2007 US 935643 P 02.04.2008 US 78663
|
(71) |
Applicant: ASML Netherlands B.V. |
|
5504 DR Veldhoven (NL) |
|
(72) |
Inventors: |
|
- BANINE, Vadim Yevgenyevich
NL-5704 NK Helmond (NL)
- IVANOV, Vladimir Vitalevich
Moscow 119421 (RU)
|
(74) |
Representative: Slenders, Petrus J. W. |
|
ASML Netherlands B.V
De Run 6501 NL-5504 DR Veldhoven NL-5504 DR Veldhoven (NL) |
|