(19)

(11)

EP 2 193 219 A2

(12)

(88) Date of publication A3: 22.05.2009 (43) Date of publication: 09.06.2010 Bulletin 2010/23 (21) Application number: 08832964.4 (22) Date of filing: 17.09.2008

(51) International Patent Classification (IPC):  C23C 16/40(2006.01) H01L 51/52(2006.01) C23C 16/455(2006.01) (86) International application number: PCT/US2008/010804 (87) International publication number: WO 2009/042052 (02.04.2009 Gazette 2009/14)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (30) Priority: 26.09.2007 US 861519 (71) Applicant: Eastman Kodak Company Rochester, NY 14650-2201 (US)

(72) Inventors: FEDOROVSKAYA, Elena A. Rochester New York 14650 (US) BOROSON, Michael Louis Rochester New York 14650 (US) LEVY, David Howard Rochester New York 14650 (US) AGOSTINELLI, John Alphonse Rochester New York 14650 (US) (74) Representative: Weber, Etienne Nicolas  Kodak Etablissement de Chalon Campus Industriel - Départment Brevets Route de Demigny - Z.I. Nord - B.P. 21 F-71102 Chalon-sur-Saône Cedex F-71102 Chalon-sur-Saône Cedex (FR)