METHOD AND APPARATUS FOR FORMING ARBITRARY STRUCTURES FOR INTEGRATED CIRCUIT DEVICES - Patent 2195830

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EP 2 195 830 A2

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(88)	Date of publication A3:
	15.10.2009

(43)	Date of publication:
	16.06.2010 Bulletin 2010/24

(21)	Application number: 08807647.6

(22)	Date of filing: 12.09.2008

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International Patent Classification (IPC):

H01L 21/48^(2006.01)
H01L 23/473^(2006.01)

H01L 23/538^(2006.01)

(86)	International application number:
	PCT/IB2008/053714

(87)	International publication number:
	WO 2009/034557 (19.03.2009 Gazette 2009/12)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

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Priority:

14.09.2007 US 972701 P

(71)	Applicant: NXP B.V.
	5656 AG Eindhoven (NL)

(72)	Inventor:
	WYLAND, Christopher San Jose, California 95131 (US)

(74)	Representative: Williamson, Paul Lewis
	NXP Semiconductors IP Department Betchworth House 57-65 Station Road Redhill Surrey RH1 1DL Redhill Surrey RH1 1DL (GB)

(54)	METHOD AND APPARATUS FOR FORMING ARBITRARY STRUCTURES FOR INTEGRATED CIRCUIT DEVICES