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(11)

EP 2 205 775 A1

(12)

(43) Date of publication: 14.07.2010 Bulletin 2010/28 (21) Application number: 07815243.6 (22) Date of filing: 26.09.2007

(51) International Patent Classification (IPC):  C23F 1/12(2006.01) H01L 21/3065(2006.01) H01L 21/306(2006.01) (86) International application number: PCT/AU2007/001425 (87) International publication number: WO 2009/039552 (02.04.2009 Gazette 2009/14)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (71) Applicant: Silverbrook Research Pty. Ltd Balmain, New South Wales 2041 (AU)	(72) Inventors: MCREYNOLDS, Darrell, LaRue Balmain New South Wales 2041 (AU) LAKSHMI, C., S. Balmain New South Wales 2041 (AU) SILVERBROOK, Kia Balmain New South Wales 2041 (AU) (74) Representative: Keane, Paul Fachtna  Hanna, Moore & Curley 13 Lower Lad Lane 2 Dublin 2 Dublin (IE)