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(11)

EP 2 206 161 A1

(12)

(43) Date of publication: 14.07.2010 Bulletin 2010/28 (21) Application number: 08804686.7 (22) Date of filing: 24.09.2008

(51) International Patent Classification (IPC):  H01L 31/048(2006.01) (86) International application number: PCT/EP2008/062782 (87) International publication number: WO 2009/043776 (09.04.2009 Gazette 2009/15)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (30) Priority: 04.10.2007 IT MI20071902 (71) Applicant: SAES GETTERS S.p.A. 20020 Lainate (Milano) (IT)	(72) Inventors: RONDENA, Sergio I-20013 Magenta Mi (IT) BONUCCI, Antonio I-20151 Milano Mi (IT) LONGONI, Giorgio I-20052 Monza Mi (IT) TOIA, Luca I-21040 Carnago Va (IT) AMIOTTI, Marco I-20010 Cornaredo Mi (IT) (74) Representative: Adorno, Silvano et al Società Italiana Brevetti S.p.A. Via Carducci 8 20123 Milano 20123 Milano (IT)