(19)
(11) EP 2 211 362 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
07.07.2021 Bulletin 2021/27

(45) Mention of the grant of the patent:
11.03.2020 Bulletin 2020/11

(21) Application number: 10160530.1

(22) Date of filing: 20.05.2005
(51) International Patent Classification (IPC): 
H01H 59/00(2006.01)
 B81B 3/00(2006.01)

(54)

Method for controlling a micromechanical element

Verfahren zur Steuerung eines mikromechanischen Bauteils

Procédé de commande pour un élément micromécanique

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR

(30) Priority: 15.06.2004 GB 0413341

(43) Date of publication of application:
28.07.2010 Bulletin 2010/30

(62) Application number of the earlier application in accordance with Art. 76 EPC:
05748344.8 / 1756844

(73) Proprietor: Cavendish-Kinetics B.V.
NL-5223 LA 's-Hertogenbosch (NL)

(72) Inventor:
  • Kazinczi, Robert
    5183AE's, Hertogennbosch (NL)

(74) Representative: Gill Jennings & Every LLP 
The Broadgate Tower 20 Primrose Street
London EC2A 2ES
London EC2A 2ES (GB)


(56) References cited: : 
EP-A- 1 227 496
US-A1- 2002 075 094
US-B1- 6 473 361
 WO-A-99/63559
US-A1- 2002 097 136
US-B1- 6 646 215
   
  • LEI L MERCADO ET AL: "A mechanical approach to overcome RF MEMS switch stiction problem" 2003 PROCEEDINGS 53RD. ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE. (ECTC). NEW ORLEANS, LA, MAY 27 - 30, 2003, vol. CONF. 53, 27 May 2003 (2003-05-27), pages 377-384, XP010648345 NEW YORK, NY : IEEE, US ISBN: 0-7803-7991-5
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).