ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILT..FIRO..CY..TRBGCZEEHUPLSK....IS..............................JBDM Ver 1.7.2 (20 November 2019) - 2999001/0202012142211362CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120210707W122deBibliographieenBibliographyfrBibliographieEP10160530.1200505202011011920150520enenen041334120040615GB2021070720212720100728201030202003112020112019093020200311AT20200611BG20200531CH20200311CZ20200311DK20200311EE20200311ES20200311FI20200612GR20200711IS20200311IT20200531LI20200311LT20200519LU20200311MC20200311NL20200311PL20200805PT20200311RO20200311SE20200311SI20200311SK20200519IE20200531BE20210707202127H01H 59/00 20060101AFI20100622BHEP B81B 3/00 20060101ALI20100622BHEP deVerfahren zur Steuerung eines mikromechanischen BauteilsenMethod for controlling a micromechanical elementfrProcédé de commande pour un élément micromécaniqueEP-A- 1 227 496WO-A-99/63559US-A1- 2002 075 094US-A1- 2002 097 136US-B1- 6 473 361US-B1- 6 646 215LEI L MERCADO ET AL: "A mechanical approach to overcome RF MEMS switch stiction problem" 2003 PROCEEDINGS 53RD. ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE. (ECTC). NEW ORLEANS, LA, MAY 27 - 30, 2003, vol. CONF. 53, 27 May 2003 (2003-05-27), pages 377-384, XP010648345 NEW YORK, NY : IEEE, US ISBN: 0-7803-7991-505748344.8175684420050520Kazinczi, RobertGraafseweg 2075183AE's, HertogennboschNLCavendish-Kinetics B.V.100764167SAH06194EPStatenlaan 57NL-5223 LA 's-HertogenboschNLGill Jennings & Every LLP101574570The Broadgate Tower 20 Primrose StreetLondon EC2A 2ESGBATBEBGCHCYCZDEDKEEESFIFRGBGRHUIEISITLILTLUMCNLPLPTROSESISKTR