(19)
(11) EP 2 211 372 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
12.10.2016 Bulletin 2016/41

(45) Mention of the grant of the patent:
17.08.2016 Bulletin 2016/33

(21) Application number: 10151452.9

(22) Date of filing: 22.01.2010
(51) International Patent Classification (IPC): 
H01L 21/67(2006.01)

(54)

Die-ejector

Chip-Auswerfer

Ejecteur de puces


(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

(30) Priority: 22.01.2009 US 146411 P

(43) Date of publication of application:
28.07.2010 Bulletin 2010/30

(73) Proprietor: Besi Switzerland AG
CH-6330 Cham (CH)

(72) Inventors:
  • Kuster, Roland
    8902, Urdorf (CH)
  • Muehlemann, Ives
    6330, Cham (CH)
  • Urben, Matthias
    6003, Luzern (CH)
  • Kloeckner, Daniel
    6004, Luzern (CH)

(74) Representative: Falk, Urs 
Patentanwaltsbüro Dr. Urs Falk Eichholzweg 9A
6312 Steinhausen
6312 Steinhausen (CH)


(56) References cited: : 
EP-A2- 1 596 422
JP-A- 2009 272 430
WO-A1-2008/041273
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).