(19)
(11) EP 2 211 594 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
02.02.2011 Bulletin 2011/05

(43) Date of publication A2:
28.07.2010 Bulletin 2010/30

(21) Application number: 10000408.4

(22) Date of filing: 18.01.2010
(51) International Patent Classification (IPC): 
H05G 2/00(2006.01)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated Extension States:
AL BA RS

(30) Priority: 21.01.2009 JP 2009010691

(71) Applicant: Ushiodenki Kabushiki Kaisha
Chiyoda-ku 100 Tokyo (JP)

(72) Inventor:
  • Yokohama, Takuma
    Gotenba-shi Shizuoka-ken (JP)

(74) Representative: Tomerius, Isabel et al
Lang & Tomerius Patentanwälte Landsberger Strasse 300
80687 München
80687 München (DE)

   


(54) Extreme ultraviolet light source device


(57) The invention relates to an extreme ultraviolet light source device, comprising a pair of discharge electrodes (11, 12) arranged oppositely to each other, a pulsed power supply means (8) supplying pulsed power to said discharge electrodes (11, 12), a raw material supply means (11b, 12b) supplying a liquid or solid raw material for the emission of extreme ultraviolet radiation to said discharge electrodes (11, 12) and onto these electrodes (11, 12), and an energy beam radiating means (23a) radiating a focused energy beam (23) towards said raw material (11a) having been supplied onto said discharge electrodes (11, 12) to gasify said raw material (11a) and to start a discharge between said pair of electrodes (11, 12).The surface of said raw material (11a) is arranged at a position shifted from the focal point (P) of the energy beam (23) towards the irradiation entrance side of the energy beam (23).







Search report