ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTRBGCZEEHUPLSKBAHRIS..MTNORS..SM..................JDIM360 Ver 2.15 (14 Jul 2008) - 1620000/02211594EUROPEAN PATENT APPLICATIONA320110202EP10000408.420100118enenen200901069120090121JP2011020220110520100728201030H05G 2/00 20060101AFI20100428BHEP deExtrem ultraviolette LichtquellenvorrichtungenExtreme ultraviolet light source devicefrDispositif de source lumineuse à ultraviolet extrême2Ushiodenki Kabushiki Kaisha101073584U.P 766 EP6-1 Ohtemachi 2-chomeChiyoda-ku 100 TokyoJPYokohama, Takumac/o Ushio Inc. 1-90 KomakadoGotenba-shi Shizuoka-kenJPTomerius, Isabelet al100038050Lang & Tomerius Patentanwälte Landsberger Strasse 30080687 MünchenDEATBEBGCHCYCZDEDKEEESFIFRGBGRHRHUIEISITLILTLULVMCMKMTNLNOPLPTROSESISKSMTRALBARS20110202201105

The invention relates to an extreme ultraviolet light source device, comprising a pair of discharge electrodes (11, 12) arranged oppositely to each other, a pulsed power supply means (8) supplying pulsed power to said discharge electrodes (11, 12), a raw material supply means (11b, 12b) supplying a liquid or solid raw material for the emission of extreme ultraviolet radiation to said discharge electrodes (11, 12) and onto these electrodes (11, 12), and an energy beam radiating means (23a) radiating a focused energy beam (23) towards said raw material (11a) having been supplied onto said discharge electrodes (11, 12) to gasify said raw material (11a) and to start a discharge between said pair of electrodes (11, 12).The surface of said raw material (11a) is arranged at a position shifted from the focal point (P) of the energy beam (23) towards the irradiation entrance side of the energy beam (23).