(84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL
PT RO SE SI SK TR |
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Designated Extension States: |
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AL BA MK RS |
(30) |
Priority: |
10.10.2007 US 869980 10.10.2007 US 869978 06.02.2008 US 26799
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(71) |
Applicant: MKS Instruments, Inc. |
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Andover, MA 01810 (US) |
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(72) |
Inventors: |
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- ROBINSON, Timothy, Roger
Burland
CW5 8QB (GB)
- ATTWOOD, Mark
Cupertino
CA 95014 (US)
- CHEN, Xing
Lexington
MA 02421 (US)
- HOLBER, William, M.
Winchester
MA 01890 (US)
- LONGSON, Mark, Philip
Waterhouses ST10 3HG (GB)
- PALK, Jonathan, Henry
Sandbach CW11 3BZ (GB)
- SHAJII, Ali
Canton
MA 02021 (US)
- SMITH, John, A.
North Andover
MA 01845 (US)
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(74) |
Representative: Lang, Johannes |
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Patent- und Rechtsanwälte
Bardehle Pagenberg Dost Altenburg Geissler
Galileiplatz 1 81679 München 81679 München (DE) |
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