PROCESS FOR PRODUCING SINGLE CRYSTAL SiC SUBSTRATE

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EP 2 216 428 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	16.08.2017 Bulletin 2017/33

(45)	Mention of the grant of the patent:
	07.06.2017 Bulletin 2017/23

(21)	Application number: 08852872.4

(22)	Date of filing: 29.10.2008

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International Patent Classification (IPC):

C30B 29/36^(2006.01)
C30B 1/10^(2006.01)
H01L 21/20^(2006.01)
H01L 21/265^(2006.01)
H01L 27/12^(2006.01)

C23C 14/48^(2006.01)
H01L 21/02^(2006.01)
H01L 21/205^(2006.01)
H01L 21/316^(2006.01)
H01L 21/762^(2006.01)

(86)	International application number:
	PCT/JP2008/070160

(87)	International publication number:
	WO 2009/066566 (28.05.2009 Gazette 2009/22)

(54)	PROCESS FOR PRODUCING SINGLE CRYSTAL SiC SUBSTRATE VERFAHREN ZUR HERSTELLUNG EINES SiC-MONOKRISTALLSUBSTRATS PROCÉDÉ DE FABRICATION D'UN SUBSTRAT DE SiC MONOCRISTALLIN

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

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Priority:

19.11.2007 JP 2007298752

(43)	Date of publication of application:
	11.08.2010 Bulletin 2010/32

(73)	Proprietor: Air Water Inc.
	Sapporo-shi Hokkaido 060-0003 (JP)

(72)	Inventors:
	IZUMI, Katsutoshi Sakai-shi Osaka 599-8233 (JP) YOKOYAMA, Takashi Matsumoto-shi Nagano 390-1701 (JP)

(74)	Representative: Hering, Hartmut
	Patentanwälte Berendt, Leyh & Hering Innere Wiener Strasse 20 81667 München 81667 München (DE)

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References cited: :

JP-A- 4 075 379
JP-A- 2003 224 248
JP-A- 2005 268 460
US-A- 5 759 908

JP-A- 2001 094 082
JP-A- 2004 296 558
JP-A- 2007 324 573
US-A1- 2002 089 032

STECKL A J ET AL: "SIC SILICON-ON-INSULATOR STRUCTURES BY DIRECT CARBONIZATION CONVERSION AND POSTGROWTH FROM SILACYCLOBUTANE", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, ELECTROCHEMICAL SOCIETY. MANCHESTER, NEW HAMPSHIRE, US, vol. 141, no. 6, 1 June 1994 (1994-06-01), pages L66-L68, XP000469381, ISSN: 0013-4651

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).