(19)

(11)

EP 2 217 736 A1

(12)

(43) Date of publication: 18.08.2010 Bulletin 2010/33 (21) Application number: 07870514.2 (22) Date of filing: 26.10.2007

(51) International Patent Classification (IPC):  C23C 4/08(2006.01) C23C 4/02(2006.01) C23C 4/18(2006.01) (86) International application number: PCT/IN2007/000514 (87) International publication number: WO 2009/053992 (30.04.2009 Gazette 2009/18)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (71) Applicant: The Secretary, Department Of Atomic Energy, Govt. of India Anushakti Bhavan Chatrapati Shivaji Maharaj Marg Mumbai 400 001, Maharastra (IN)	(72) Inventors: GANESAN, Srinivasan Kalpakkam (IN) BHADURI, Arun Kumar Tamilnadu 603102 (IN) RAJ, Baldev Tamilnadu 603102 (IN) VENKATRAMAN, Gopal Tamilnadu 600028 (IN) (74) Representative: Jones, Keith William  Fisher Weiler Jones Apollo House Eboracum Way York YO31 7RE York YO31 7RE (GB)