(19)
(11) EP 2 220 263 A1

(12)

(43) Date of publication:
25.08.2010 Bulletin 2010/34

(21) Application number: 08841116.0

(22) Date of filing: 27.10.2008
(51) International Patent Classification (IPC): 
C23C 14/00(2006.01)
(86) International application number:
PCT/US2008/012170
(87) International publication number:
WO 2009/055065 (30.04.2009 Gazette 2009/18)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated Extension States:
AL BA MK RS

(30) Priority: 26.10.2007 US 996063 P

(71) Applicant: DEPOSITION SCIENCES, INC.
Santa Rosa California 95403 (US)

(72) Inventors:
  • BOLING, Norman, L.
    Santa Rosa CA 95409 (US)
  • RAINS, Miles
    Santa Rosa CA 95409 (US)
  • GRAY, Howard, R.
    Sebastopol CA 95472 (US)

(74) Representative: Liesegang, Eva 
Forrester & Boehmert Pettenkoferstrasse 20-22
80336 München
80336 München (DE)

   


(54) THIN FILM COATING SYSTEM AND METHOD