(19)

(11)

EP 2 220 674 A2

(12)

(88) Date of publication A3: 17.09.2009 (43) Date of publication: 25.08.2010 Bulletin 2010/34 (21) Application number: 08861207.2 (22) Date of filing: 28.11.2008

(51) International Patent Classification (IPC):  H01L 21/48(2006.01) H01L 23/473(2006.01) H01L 23/367(2006.01) (86) International application number: PCT/JP2008/072110 (87) International publication number: WO 2009/078289 (25.06.2009 Gazette 2009/26)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (30) Priority: 14.12.2007 JP 2007322831 (71) Applicant: Toyota Jidosha Kabushiki Kaisha Toyota-shi, Aichi 471-8571 (JP)	(72) Inventors: MORINO, Masahiro Toyota-shi Aichi 471-8571 (JP) TAKETSUNA, Yasuji Toyota-shi Aichi 471-8571 (JP) TAKANO, Yuya Toyota-shi Aichi 471-8571 (JP) INOSHITA, Hirofumi Toyota-shi Aichi 471-8571 (JP) (74) Representative: Jackson, Martin Peter et al J.A. Kemp & Co. 14 South Square Gray's Inn London WC1R 5JJ London WC1R 5JJ (GB)