(19)
(11) EP 2 224 472 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
19.03.2014 Bulletin 2014/12

(45) Mention of the grant of the patent:
15.01.2014 Bulletin 2014/03

(21) Application number: 08861759.2

(22) Date of filing: 26.11.2008
(51) International Patent Classification (IPC): 
H01L 21/768(2006.01)
H01L 21/288(2006.01)
H01L 23/532(2006.01)
C23C 18/18(2006.01)
C23C 14/00(2006.01)
 H01L 21/285(2006.01)
H01L 21/3205(2006.01)
C23C 18/16(2006.01)
C23C 18/40(2006.01)
C23C 14/16(2006.01)
(86) International application number:
PCT/JP2008/071452
(87) International publication number:
WO 2009/078254 (25.06.2009 Gazette 2009/26)

(54)

SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

SUBSTRAT UND VERFAHREN ZU SEINER HERSTELLUNG

SUBSTRAT ET SON PROCÉDÉ DE FABRICATION

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

(30) Priority: 17.12.2007 JP 2007324684

(43) Date of publication of application:
01.09.2010 Bulletin 2010/35

(73) Proprietor: JX Nippon Mining & Metals Corporation
Tokyo (JP)

(72) Inventors:
  • ITO, Junichi
    Kitaibaraki-shi Ibaraki 319-1535 (JP)
  • YABE, Atsushi
    Kitaibaraki-shi Ibaraki 319-1535 (JP)
  • SEKIGUCHI, Junnosuke
    Kitaibaraki-shi Ibaraki 319-1535 (JP)
  • IMORI, Toru
    Kitaibaraki-shi Ibaraki 319-1535 (JP)

(74) Representative: Schwabe - Sandmair - Marx 
Patentanwälte Stuntzstraße 16
81677 München
81677 München (DE)


(56) References cited: : 
WO-A1-00/38224
JP-A- 2004 072 111
JP-A- 2007 150 298
US-A1- 2003 201 537
 JP-A- 5 315 336
JP-A- 2007 116 167
US-A- 5 506 449
US-A1- 2007 232 044
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).