(19)

(11)

EP 2 232 533 A1

(12)

(43) Date of publication: 29.09.2010 Bulletin 2010/39 (21) Application number: 08871114.8 (22) Date of filing: 30.12.2008

(51) International Patent Classification (IPC):  H01L 21/20(2006.01) H01L 21/306(2006.01) (86) International application number: PCT/IB2008/055579 (87) International publication number: WO 2009/090520 (23.07.2009 Gazette 2009/30)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA MK RS (30) Priority: 16.01.2008 EP 08100543 (71) Applicant: IPDIA 14000 Caen (FR)	(72) Inventors: NEUILLY, François NL-5656 AG Eindhoven (NL) MEUNIER-BEILLARD, Philippe NL-5656 AG Eindhoven (NL) (74) Representative: Cabinet Plasseraud  52, rue de la Victoire 75440 Paris Cedex 09 75440 Paris Cedex 09 (FR)