(19)
(11) EP 2 236 245 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
11.09.2013 Bulletin 2013/37

(43) Date of publication A2:
06.10.2010 Bulletin 2010/40

(21) Application number: 10250452.9

(22) Date of filing: 11.03.2010
(51) International Patent Classification (IPC): 
B24B 37/04(2012.01)
 B24B 53/007(2006.01)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated Extension States:
AL BA ME RS

(30) Priority: 27.03.2009 JP 2009079630

(71) Applicant: Fujikoshi Machinery Corp.
Nagano-shi Nagano 381-1233 (JP)

(72) Inventor:
  • Sakata, Kentaro
    Nagano-shi, Nagano 381-1233 (JP)

(74) Representative: Stuart, Ian Alexander et al
Mewburn Ellis LLP 33 Gutter Lane
London EC2V 8AS
London EC2V 8AS (GB)

   


(54) Equipment and method for cleaning polishing cloth


(57) The equipment (34) for cleaning polishing cloth (16) is capable of increasing pressure of washing water received by the polishing cloth (16), securely removing deposits from the polishing cloth (16) and improving polishing efficiency. The equipment (34) is used in a polishing apparatus (10), in which a work piece (20) is pressed onto the polishing cloth (16) adhered on a polishing plate (12) and the work piece (20) is relatively moved with respect to the polishing plate (12) with supplying slurry to the polishing cloth (16) so as to polish the work piece (20). The equipment (34) comprises a nozzle unit (48) having a nozzle (50) capable of spraying high-pressure washing water toward the polishing cloth (16). The nozzle (50) is a straight nozzle capable of linearly spraying the washing water and perpendicularly spraying the washing water with respect to the polishing cloth (16).







Search report









Search report