(19)
(11) EP 2 238 608 A1

(12)

(43) Date of publication:
13.10.2010 Bulletin 2010/41

(21) Application number: 08871196.5

(22) Date of filing: 18.11.2008
(51) International Patent Classification (IPC): 
H01L 21/027(2006.01)
(86) International application number:
PCT/US2008/012901
(87) International publication number:
WO 2009/094009 (30.07.2009 Gazette 2009/31)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated Extension States:
AL BA MK RS

(30) Priority: 22.01.2008 US 11861

(71) Applicant: Rolith, Inc.
Dublin, CA 94568 (US)

(72) Inventors:
  • KOBRIN, Boris
    Dublin CA 94568 (US)
  • LANDAU, Igor
    Palo Alto CA 94301 (US)
  • VOLF, Boris
    Hillsborough NJ 08844 (US)

(74) Representative: Howson, Richard G.B. et al
Kilburn & Strode LLP 20 Red Lion Street
London WC1R 4PJ
London WC1R 4PJ (GB)

   


(54) LARGE AREA NANOPATTERNING METHOD AND APPARATUS