(19)
(11) EP 2 245 656 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
28.10.2020 Bulletin 2020/44

(45) Mention of the grant of the patent:
08.01.2020 Bulletin 2020/02

(21) Application number: 09708576.5

(22) Date of filing: 05.02.2009
(51) International Patent Classification (IPC): 
H01L 21/677(2006.01)
(86) International application number:
PCT/IB2009/050457
(87) International publication number:
WO 2009/098650 (13.08.2009 Gazette 2009/33)

(54)

AUTOMATIC HANDLING BUFFER FOR BARE STOCKER

AUTOMATISCHER HANDHABUNGSPUFFER FÜR EINE BLOSSABLAGEVORRICHTUNG

TAMPON DE MANIPULATION AUTOMATIQUE POUR DISPOSITIF DE STOCKAGE DE PIÈCES NUES

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

(30) Priority: 05.02.2008 US 25752
05.02.2008 US 25769

(43) Date of publication of application:
03.11.2010 Bulletin 2010/44

(73) Proprietor: Brooks Automation (Germany) GmbH
78315 Radolfzell (DE)

(72) Inventor:
  • REBSTOCK, Lutz
    78315 Radolfzell (DE)

(74) Representative: Kudlek, Franz Thomas et al
m patent group Postfach 33 04 29
80064 München
80064 München (DE)


(56) References cited: : 
WO-A-00/62332
US-A1- 2002 094 257
 JP-A- 2003 182 815
US-A1- 2003 091 410
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).