(19)
(11) EP 2 246 880 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
28.06.2017 Bulletin 2017/26

(45) Mention of the grant of the patent:
21.12.2016 Bulletin 2016/51

(21) Application number: 09712194.1

(22) Date of filing: 16.02.2009
(51) International Patent Classification (IPC): 
H01L 21/338(2006.01)
H01L 29/778(2006.01)
H01L 29/812(2006.01)
 H01L 21/318(2006.01)
H01L 29/786(2006.01)
(86) International application number:
PCT/JP2009/052537
(87) International publication number:
WO 2009/104554 (27.08.2009 Gazette 2009/35)

(54)

SEMICONDUCTOR DEVICE FABRICATION METHOD

VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERBAUELEMENTS

PROCÉDÉ DE FABRICATION D'UN DISPOSITIF SEMI-CONDUCTEUR

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

(30) Priority: 22.02.2008 JP 2008041345

(43) Date of publication of application:
03.11.2010 Bulletin 2010/44

(73) Proprietor: Sumitomo Electric Device Innovations, Inc.
Yokohama-shi Kanagawa 244-0845 (JP)

(72) Inventor:
  • KOMATANI, Tsutomu
    Kanagawa 244-0845 (JP)

(74) Representative: Fenlon, Christine Lesley 
Haseltine Lake LLP Lincoln House, 5th Floor 300 High Holborn
London WC1V 7JH
London WC1V 7JH (GB)


(56) References cited: : 
EP-A2- 1 798 762
JP-A- 2006 278 812
JP-A- 2008 205 392
US-A1- 2007 164 322
 JP-A- 2004 221 325
JP-A- 2007 073 555
US-A1- 2003 042 534
US-A1- 2008 203 541
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).