(19)
(11) EP 2 253 006 A1

(12)

(43) Date of publication:
24.11.2010 Bulletin 2010/47

(21) Application number: 09710101.8

(22) Date of filing: 10.02.2009
(51) International Patent Classification (IPC): 
H01J 37/147(2006.01)
H01J 37/315(2006.01)
 H01J 37/21(2006.01)
(86) International application number:
PCT/EP2009/000919
(87) International publication number:
WO 2009/100877 (20.08.2009 Gazette 2009/34)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
Designated Extension States:
AL BA RS

(30) Priority: 15.02.2008 DE 102008009410

(71) Applicant: PTR Präzisionstechnik GmbH
63477 Maintal (DE)

(72) Inventors:
  • JUNG, Bernhard
    63477 Maintal (DE)
  • SCHULZE, Klaus-Rainer
    63543 Neuberg (DE)

(74) Representative: Kramer - Barske - Schmidtchen 
European Patent Attorneys Landsberger Straße 300
80687 München
80687 München (DE)

   


(54) AN ELECTRON BEAM UNIT AND METHOD FOR ADJUSTING ELECTRON BEAMS GENERATED BY AN ELECTRON BEAM UNIT