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(11) | EP 2 255 939 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Breaking apparatus and breaking method |
(57) A substrate is held on a table 22, and the substrate is caused to project beyond
a lateral side of the table 22 and is positioned by a positioning section 30. Then,
that part of the substrate 23 which is located on the table is locked in place by
a clamping section 40. Subsequently the substrate is broken along a scribing line,
with its projecting part kept pressed from above, by using a breaking unit 50. In
this way, a substrate of even smaller size can be precisely broken with ease under
uniform application of pressure.
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