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EP 2 263 248 A1

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(43) Date of publication: 22.12.2010 Bulletin 2010/51 (21) Application number: 09716494.1 (22) Date of filing: 13.02.2009

(51) International Patent Classification (IPC):  H01J 37/08(2006.01) H01J 37/065(2006.01) H01J 37/30(2006.01) H01J 27/26(2006.01) H01J 37/26(2006.01) (86) International application number: PCT/US2009/034000 (87) International publication number: WO 2009/111149 (11.09.2009 Gazette 2009/37)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR Designated Extension States: AL BA RS (30) Priority: 03.03.2008 US 33208 (71) Applicant: Carl Zeiss SMT, Inc. Peabody, Massachusetts 01960 (US)	(72) Inventor: NOTTE IV, John V. Gloucester, MA 01930 (US) (74) Representative: Carl Zeiss AG - Patentabteilung  Carl Zeiss AG c/o Patentabteilung Carl-Zeiss-Straße 22 73447 Oberkochen 73447 Oberkochen (DE)